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A. N. Shatokhin, F. N. Putilin, M. N. Roumiantseva, A. M. Gas’kov
Study
of energy characteristics and deposition rate of metal films from vacuum laser
plasma on dielectric substrates
Abstract
Influence of pulse energy density Kr–F-laser on processes
laser plasma generation of tin, palladium and platinum, deposition rate of
metal films on dielectric substrates is investigated at laser ablation.
Application of methods of differential probe of laser plasma with cylinders
Faraday and the linear electrostatic mass-spectrometer has allowed to allocate
in ionic signals of plasma of single-charged and multi-charged the ions differing
on kinetic energy. It is shown, that deposition rate of films depends as on
energy density of the laser, and a level of ionization of laser plasma.
Copyright (C) Chemistry Dept., Moscow State University, 2002
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